The newest addition to the MS-50 series
is ideal for precise, quantitative leak measurements when
extreme sensitivity is required: semiconductor, electronics,
and packaging industries; instrumentation, physics research and
development as well as the medical and pharmaceutical
industries.
The MS-50 High-Sensitivity offers the
highest leak-rate sensitivity and the broadest testing range
available today:
• Sensitivity: 3.0 x 10-12 atm-cc/sec
• Leak range: 3.0 x 10-12 to
1 atm-cc/sec
• No LN2 required
• Direct flow vacuum operation
response time <2 seconds
• 7 cfm direct drive foreline pump
• 16 cfm direct drive roughing pump
• 52 liter/sec turbo-molecular high
vacuum pump
• 50 programmable test recipes
• CE units available
• The High-Sensitivity includes all
standard features of the familiar line of the MS-50 leak detectors
